redvbooks Chapter 133 National MEMS Major Project
Chapter 133 National MEMS Major Project
The first topic of discussion at the roundtable was the core technology of MEMS manufacturing.
Zhao Jiancheng participated in the discussion via video link from Kunshan University—this was specially arranged by Su Chen because although the academic leaders present had a solid theoretical foundation, they had limited understanding of the current state of MEMS manufacturing on the front lines.
Zhao Jiancheng's report was concise and professional:
"Currently, Hongyuan Microsystems' production line consists of one SÜSS stepper lithography machine, one Oxford Instruments etching machine, and one Leybold thin film deposition system. It provides a complete 4-inch MEMS process."
"Production line upgrade plan – Add one SÜSS MA200 stepper lithography machine to improve lithography precision from 2 micrometers to 0.5 micrometers. Add one DRIE deep silicon etching machine to achieve high aspect ratio silicon through-hole etching. Upgrade the thin film deposition equipment to be able to produce AlN piezoelectric thin films."
"The upgrade is expected to be completed in three to four months."
After listening to Zhao Jiancheng's report, Professor Sun from Tsinghua University was the first to speak:
"Mr. Zhao, the DRIE equipment you mentioned—the latest model from Oxford Instruments—is subject to export controls. Which model did you purchase?"
"The previous generation was the PlasmaPro 100 Estrelas," Zhao Jiancheng said. "The latest model is indeed subject to restrictions, but the previous generation didn't have these issues. Its performance was slightly inferior, but after parameter optimization, it met our needs."
"How much difference?" Professor Sun pressed.
"深宽比方面，最新款能做到30:1，上一代大概在20:1左右。但我们第一步目标对标BMI270，20:1已经足够。"
"But what about the second step?" Professor Sun's eyes sharpened. "You need to develop a high-precision gyroscope that surpasses the Murata SCR1100—that kind of structure requires a DRIE aspect ratio of at least 25:1. The previous generation of equipment couldn't do that."
Zhao Jiancheng was silent for a second.
At this moment, Su Chen spoke up:
"Professor Sun is right. This is precisely the core issue I wanted to raise in today's discussion."
Su Chen stood up.
"There are two traditional routes for MEMS manufacturing processes—surface micromachining and bulk silicon micromachining."
"Surface micromachining is low-cost and high-volume, but its precision has limitations—this is currently the mainstream process for most consumer-grade MEMS."
"Bulk silicon micromachining offers high precision and reliability, but the process is complex and costly—this is the mainstream process for military-grade MEMS and the foundation for the process used in Murata's SCR1100."
"If we follow the traditional route—starting with surface micromachining and then gradually transitioning to bulk silicon micromachining—it will take at least three to five years."
"But I think differently."
Su Chen drew a simple diagram on the whiteboard:
"I suggest skipping the pure surface micromachining route and going directly to the bulk silicon + SOI (silicon-on-insulator) hybrid process route."
Whispers immediately filled the conference room.
Researcher Qian from the Shanghai Institute of Microsystem and Information Technology was the first to raise questions:
"Mr. Su, SOI hybrid technology has only been verified in the laboratory stage internationally. STMicroelectronics and Bosch have not yet fully adopted it on their mass production lines. For your 4-inch production line to directly implement SOI hybrid technology—isn't that too risky?"
"Moreover, SOI wafers cost five to eight times more than ordinary silicon wafers," Researcher Qian added. "Can your funds afford it?"
Faced with the doubts, Su Chen was not in a hurry.
"The risks Professor Qian mentioned do exist. But I'd like to look at this issue from a different perspective."
"If we follow the traditional route—surface micromachining → bulk silicon micromachining → finally reaching SOI hybrid technology—it will take at least three steps, each taking at least one to two years."
"But if we start directly with SOI hybrid technology—although the first step has a higher barrier to entry and greater risks, once we break through, we will be on the same starting line as international giants in the same generation of technology."
"It's not about catching up, it's about being on equal footing."
"This is consistent with Hongyuan's consistent style—we never follow the same path as others."
Professor Sun from Tsinghua University nodded thoughtfully.
But Academician Zhou Jianhua's expression remained calm, revealing neither his support nor his opposition.
At this moment, Zhao Jiancheng interjected with a sentence in the video:
"If we're going to pursue the SOI hybrid process route, the aspect ratio of DRIE is indeed a bottleneck. But I want to say something—"
"I just came from Microsensor Semiconductor, where I previously worked on similar DRIE parameter optimization. Using the same equipment, by adjusting the etching gas ratio, circulation parameters, and stage temperature, the aspect ratio can be increased from the nominal 20:1 to around 24:1."
"and--"
Zhao Jiancheng paused:
"I just hired a master craftsman named Chen Guodong. He's 52 years old and has 30 years of experience in the DRIE process. His feel for the machine and his experience allow him to bring out different performance from the same equipment."
"How does it feel?" Academician Zhou finally spoke, his tone tinged with curiosity.
"Yes," Zhao Jiancheng said. "This person's understanding of silicon wafers has reached an intuitive level. He can feel wafer defects that others need a microscope to see with just a touch. With the same equipment and the same process parameters, he can achieve a yield rate 20% higher than others."
"In the field of MEMS processes, experience is sometimes more important than equipment."
The meeting room was silent for a few seconds.
Then Academician Zhou said something profound:
"'The core carrier of craft know-how is people, not time'—it turns out you weren't just saying that casually."
Su Chen smiled slightly.
"Academician Zhou, every word I've said is carefully considered."
Academician Zhou looked at Su Chen for a few seconds, then slowly nodded.
"I support the SOI hybrid process route."
The atmosphere in the meeting room changed immediately after those words were spoken.
Academician Zhou Jianhua is an absolute authority in China's MEMS field. His support carries immense weight for everyone present.
"However—" Academician Zhou changed the subject, "how do you plan to solve the problem of SOI wafer sourcing? There are only a handful of companies in China currently capable of producing high-quality SOI wafers."
"This is one of the reasons I proposed establishing the National MEMS Major Project," Su Chen said. "The localization of basic materials such as SOI wafers, AlN piezoelectric films, and high-purity silicon-based materials cannot be solved by a single company; it requires collaboration across the entire industry."
"Hongyuan can be a pioneer, making breakthroughs in applications and processes. But in terms of basic materials, a national-level plan is needed."
Academician Zhou nodded, then looked at Vice Minister Zheng Weiguo.
Zheng Weiguo had been listening attentively, and now he slowly began to speak:
"Su Chen's suggestion aligns with our internal assessment."
"MEMS sensors are the heart of the low-altitude economy and fundamental components of the era of the Internet of Things. Self-reliance and control in this field are no longer an option, but a necessity."
Regarding the establishment of a national major project for MEMS sensors—
Zheng Weiguo paused for a moment and glanced at the entire audience:
"I can state my position today."
"Our Electronic Information Department is already pushing forward with this special project. Today's symposium is part of the preliminary research for the project."
"But after listening to Su Chen's report today, I feel that the intensity of this special project needs to be increased."
I have a few initial ideas—
Zheng Weiguo held up his fingers and said, one by one:
"First, a national joint research team for MEMS sensors will be established. Led by the Institute of Microelectronics of the Chinese Academy of Sciences, and in conjunction with the Tsinghua University Institute of Microelectronics, the Shanghai Institute of Microsystem and Information Technology, and Hongyuan Microsystems, the team will conduct joint research on the core technologies of MEMS inertial sensors."
"Second, establish a special fund for MEMS sensors. The initial size will be no less than 5 million yuan, supporting R&D across the entire chain, from basic materials to process equipment to mass production."
"Third, establish a green channel for the import of key MEMS equipment. For equipment such as DRIE (Digital Transmission Equipment), lithography machines, and thin-film deposition equipment required for MEMS manufacturing, expedite the approval process as much as possible within the scope of export controls."
"fourth--"
Zheng Weiguo looked at Su Chen:
"Hongyuan Microsystems' production line serves as the industrialization verification base for the joint research team. Design results from research institutions are prioritized for tape-out verification on Hongyuan's production line."
"Su Chen, are you willing?"
"Of course I'm willing," Su Chen answered without hesitation. "As I mentioned in my report—Hongyuan's production lines, markets, and funds will all be open to the joint research effort."
"Okay." Zheng Weiguo nodded.
Then he looked at Academician Zhou: "Professor Zhou, we still need your leadership on the academic aspects of the joint research team."
Academician Zhou was silent for a few seconds, then slowly said:
"I'm 73 this year. I was planning to retire next year."
But after listening to what this young man said today—
He glanced at Su Chen:
"Let's postpone retirement for another two years."
A burst of laughter filled the conference room, followed by enthusiastic applause.
Academician Zhou continued:
"I have 12 PhD students and over 30 master's students under my supervision. Among them, 8 PhD students and 15 master's students are working on MEMS inertial sensors. I can bring these people into the joint research team."
"However—" Academician Zhou's tone shifted, becoming serious, "Su Chen, I have one condition."
"Please speak, Academician Zhou."
"The core patents resulting from joint research must remain in Chinese hands. Regardless of how Hongyuan develops in the future—whether through financing, listing, or introducing strategic investors—the core technology patents for MEMS self-sufficiency must not fall into foreign hands."
Can you guarantee that?
Su Chen stood up and said solemnly:
"Academician Zhou, I guarantee that all core technology patents for Hongyuan MEMS's independent development will forever belong to China. This is my bottom line, and it is also Hongyuan's bottom line."
Academician Zhou stared at Su Chen for a few seconds.
Then he nodded.
"Okay. Then I'll accompany you for a while."
"Clap clap clap clap clap clap clap clap clap clap..."
Applause erupted again.
This time it was even more enthusiastic than before.
Because everyone knows that Academician Zhou's joining means that the strongest force in the entire Chinese MEMS academic community will converge with Hongyuan, a pioneer in the industry.
This is no longer just about one company's MEMS self-sufficiency.
This is a nationwide effort.
Although it is not as large as the "Two Bombs, One Satellite" project, its determination and vision are consistent with those of the past.
……
The meeting didn't end until after 5 p.m.
Afterwards, Su Chen and Academician Zhou talked alone for more than ten minutes.
"Su Chen, I have a question for you." Academician Zhou leaned back in his chair, his tone casual, like an elder chatting with a younger person.
"Please speak."
"The 'two-step' strategy you mentioned today—first, benchmarking against Bosch's BMI270, and second, surpassing Murata's SCR1100."
"I believe you can do the first step. You have a production line, a team, and a market, and the BMI270's performance metrics aren't extreme. Six months to a year shouldn't be a problem."
"But for the second step—surpassing the SCR1100—how confident are you really?"
Su Chen remained silent for a few seconds.
He didn't want to say anything polite in front of Academician Zhou.
"Academician Zhou, if we rely solely on conventional research and development methods—my chances of success are no more than 30%."
Academician Zhou raised his eyebrows slightly.
30%—this figure was lower than he had expected.
"But—" Su Chen said, "I have some ideas and technical directions that I can't reveal right now. I'll discuss them with you in detail after we complete the first step."
Academician Zhou looked into Su Chen's eyes and remained silent for a few seconds.
He saw two things in Su Chen's eyes—
It's the same honesty. A 30% certainty—that's not a figure a hypocrite would give.
Another thing is confidence. That kind of confidence that "30% is just a superficial number, and the actual strength is much greater than that."
"Okay." Academician Zhou stood up, patted Su Chen on the shoulder, and said, "I'll wait for your first result."
"We've accomplished the first step—we'll discuss the second step in more detail later."
"Thank you, Academician Zhou."
"Don't thank me," Academician Zhou smiled. "I'm doing this for China's MEMS, not for you, Su Chen. If you disappoint me—I won't hold back."
"I won't let you down."
As Academician Zhou watched Su Chen's retreating figure walk out of the conference room, he murmured something.
"I hope so."
……
That evening, Su Chen received a message from Fang Xu while staying at his hotel in Beijing.
"Mr. Su, Wang Minghui from Qiming Venture Partners called me today."
"What did he say?" Su Chen asked.
"He said he watched the news report and read the news about the symposium held by the Ministry of Industry and Information Technology, and reassessed Hongyuan's position in the MEMS industry chain."
"Then what?"
"He agreed to the 67% controlling stake proposal."
Su Chen looked at his phone screen, a slight smile playing on his lips.
Everything is proceeding according to plan.
No—it's progressing faster than planned.
The Ministry of Industry and Information Technology's major MEMS project, Academician Zhou's joint research team, and Qiming Venture Partners' 67% controlling stake—three things were settled almost on the same day.
This is no coincidence.
This is a natural chain reaction that occurred after four years of accumulation reached a critical point.
Su Chen put down his phone and walked to the window.
The night sky in Beijing is not as brightly lit as that in Shenzhen, but you can see the traffic on Chang'an Avenue in the distance, like a golden river flowing slowly in the darkness.
He recalled the scene in the conference room earlier that day—
The gazes of those academicians, professors, and PhDs.
From initial scrutiny and skepticism to later acceptance and anticipation.
He suddenly had a feeling—
This is no longer just his war alone.
From today onwards, the entire MEMS industry in China stands behind him.
This feeling filled him with pride.
Just like the feeling Lin Xuan had when he stood in the large conference room of the Chinese Academy of Sciences in the original novel, looking at thousands of researchers—
wrong.
Su Chen shook his head. He couldn't think about things using the mindset of the "original novel".
This is his own life.
His life, Su Chen's life.
"Alright." Su Chen took a deep breath.
I'm flying back to Shenzhen tomorrow; there's still so much to do.
We need to keep an eye on the mass production switch of the "six-piece version" of the Flying Bird S1 on Zhang Lei's side.
Zhao Jiancheng said that the upgrading of Kunshan's production line should be continued.
Chen Guodong's onboarding procedures need to be completed.
The formal signing of the agreement for Microchip Sensing's 67% controlling stake should be arranged as soon as possible.
The personnel coordination and work plan for Academician Zhou's joint research team need to be finalized.
Construction of a MEMS R&D center covering 8000 square meters in Guangming District is about to begin.
Six lines are being advanced simultaneously.
If any one of these steps goes wrong, the whole game could collapse.
But Su Chen wasn't afraid.
Because he has always been someone who dances on a tightrope.
……
But outside Su Chen's hotel room window, in a place he couldn't see—
An encrypted email is crossing the Pacific Ocean.
The sender's address points to Tokyo.
The recipient is He Zhiqiang from Hangxindatong Technology.
The email body contained only one sentence:
"Murata has confirmed that it will cooperate in implementing the second phase of the plan."
When He Zhiqiang saw the email in his Beijing office, a sinister smile appeared on his face.
He picked up his phone and sent a message to Chen Jiaming of DJI:
"Phase Two Launched. Target: Hongyuan's MEMS equipment supply chain."
Three seconds later, Chen Jiaming replied with two words:
"receive."